Applied equipment CVD/PVD/CMP/ETCH
P5000/P5200/P5500/HDP/Endura/Novellus
．Ozone generator．Robot．Lamp-module．DXZ Heater．Power-supply
．RF-match．O3 monitor．NVLS type-2 LTM．Servo actuator．Servo lift–pin．C-chuck．P-chuck．Producer ceramic heater．RTP．EPI
．ETCH DPS．13＂Showerhead．15＂Showerhead