P/N Description Process
0040-18053 AMAT 200mm ESC, PEDESTAL CVD
0040-18220 AMAT 200mm ESC, PEDESTAL WTM
0040-48594 AMAT 300mm Dual He ESC CVD
  • Chipping / Cracking Brand
    		•
  • Remove Coating Layer
    		•
  • Deposited By-Product
    		•
  • Cleaning up
    		•
  • Micro Removing by Physical Method
    		•
  • Through Hole Cleaming
    		•
  • Warranty
    		•