|
| P/N |
Description |
Size |
Tool |
| 0010-03840 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0010-06901 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0040-35527 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0190-03516 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0010-14700 |
Ceramic Heater Pedestal |
150/125 mm |
Producer |
| 0010-24299 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0010-24300 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0010-24685 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0010-26264 |
Ceramic Heater Pedestal |
200 mm |
Producer |
| 0010-29128 |
Ceramic Heater Pedestal |
200 mm |
Producer |
|
| Visual Inspection |
| Pedestal disassembled |
| CMM uniformity measurement |
| Contact areas are cleaned and new rods are inserted |
| Electrical connections are verified prior to brazing |
| Post-braze inspection of rods and electrical connection verified |
| Final measured |
| Pedestal is fully assembled and packaged in class 100 clean room |
| Warranty |
