|
| P/N |
Description |
Size |
Tool |
| 0010-02737 |
C-chuck |
150 mm |
P5000 |
| 0010-38438 |
C-chuck |
200 mm |
P5000 |
| 0190-09544 |
P-chuck |
125 mm |
P5000 |
| 0010-37269 |
P-chuck |
150/125 mm |
P5000 |
| 0010-02741 |
P-chuck |
150/125 mm |
P5000 |
| 0010-37266 |
P-chuck |
200 mm |
P5000 |
|
| Re-assembled |
| Components are abrasively cleaned followed by a wet clean process |
| Improve design to prevent arcing |
| Thermocouple exact match inspection |
| Final clean is performed in class 100 clean-room Indicating key measurements: |
- Protrusion surface flatness
- Protrusion height ( Mean + Stdev )
- Capacitance ( cable and platter, 8 point )
- Particle counts
- Ceramic arm to platter face parallelism
- Thermocouple calibration
|
| Warranty |
