In our factory
  • Replaced EXT/ROT motor
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  • Replaced all O-ring
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  • replaced all bearing
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  • Sensor motion check
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  • Cycle wafer test 24H
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  • Function final test
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  • Helium detector check
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    For customer service
  • Install and calibration
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  • Chamber handoff check
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  • Leak-rate check all
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  • Warranty
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