P/N Description
0010-09237 Lamp Module Basic Assembly
0010-09290 Lamp BWCVD Module
0010-09335 Lamp Module Assy.6" TEOS +4-6"
0010-09411 BWCVD 200mm Lamp Module
0010-09978 Lamp Module AV-Plated Assembly
  • Clean all necessary base
    		•
  • Replace all lamp-socket
    		•
  • Replace water-flow tube
    		•
  • Back-plate refurbished
    		•
  • Max current value check
    		•
  • Replaced all lamp
    		•
  • Remp-up inspection
    		•
  • Interlocks inspection
    		•
  • Warranty
    		•